In-situ characterisation of a 3 nm technology transistor, with probes landed on the device and a measured I–V family.
Flagship · Semiconductor

Nanoprobing

Land up to eight ultra-fine needles on individual transistors — inside your SEM or FIB/SEM — to measure their electrical behaviour at the 3 nm node and beyond.

Get in touch See the Prober Shuttle family
  • Nanoprobing
  • EBAC
  • EBIC
  • EBIRCH
  • RCI
  • Current imaging
8probes on a single shuttle
3 nmtechnology node and beyond
<0.05 nmpositioning resolution
<50 fA/Vinsulation leakage
Trusted in the world’s leading fabs and research labs
A flagship validated in the peer-reviewed literature
  • Nature Communications
  • ACS Nano
  • Communications Engineering
  • Ultramicroscopy
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The family

Prober Shuttle systems

Full catalogue
Top-down view of the PS8e Prober Shuttle, eight MM4 manipulators converging on a central chip.
PS8e

Prober Shuttle PS8e

A compact, fully integrated nanoprobing system — now encoded for automatic probe pre-alignment at the 3 nm node and beyond.

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SEM image of eight nanoprobe tips converging on a patterned chip surface, 200 nm scale bar.
PS8

Prober Shuttle PS8

High-precision in-situ electrical nanoprobing with up to eight ultra-flat MM4 manipulators — for advanced-node failure analysis.

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The PS4 Prober Shuttle hardware — a circular stage carrying four ultra-flat MM4 manipulators with copper and gold detail.
PS4

Prober Shuttle PS4

A compact two- or four-probe nanoprobing system for in-situ electrical characterization at advanced nodes.

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The NW4 platform — a load-lock-compatible base with space for up to four MM3A-EM micromanipulators arranged around a large substrate.
NW4

NW4

A load-lock platform hosting up to four MM3A-EM manipulators — nanoprobing and failure analysis on large substrates up to 120 × 120 mm.

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The ProbeWorkstation+ — multiple MM3A-EM micromanipulators arranged around a central sample on a long-range substage.
ProbeWorkstation+

ProbeWorkstation+

Up to eight manipulators, a roof-mounted prober and a 30 mm substage — a complete in-SEM probe station, installed or removed in 60 seconds.

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The Micro Heating and Cooling Stub mounted on a Prober Shuttle PS8.
MHCS-PS

Heating & Cooling Stage for PS8

A heated/cooled stub for the Prober Shuttle PS8 — regulate sample temperature from −20 °C to +150 °C during probing, water-cooling-free.

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Techniques

Semiconductor applications

SEM image of three nanoprobe tips contacting a patterned device, 50 nm scale bar.Semiconductor

Nanoprobing

Land ultra-fine needles on individual transistors to measure their electrical behaviour at the most advanced nodes.

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Evidence

Selected publications

All publications
2024Ultramicroscopy 260

Weld-free mounting of lamellae for electrical biasing operando TEM

Oscar Recalde-Benitez et al.

DOI 10.1016/j.ultramic.2024.113939
2023Communications Engineering 2

Operando two-terminal devices inside a transmission electron microscope

Oscar Recalde-Benitez et al.

DOI 10.1038/s44172-023-00133-9
2008Nanotechnology 19

Exploring the conduction in atomic-sized metallic constrictions created by controlled ion etching

A. Fernández-Pacheco et al.

DOI 10.1088/0957-4484/19/41/415302
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Put eight probes on your toughest device

Tell us your node, your failure mode and your microscope — we’ll show you the nanoprobing workflow and route you to the right regional team.

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