Eight nanoprobe tips converging to a single point on a patterned semiconductor device.
Nanomotor®-driven precision · since 1991

Give your microscope a hand.

Kleindiek Nanotechnik builds the robotic tools that touch, move, measure and electrically test objects inside electron microscopes — down to the nanometer.

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The workhorses

Perspective view of the PS8e Prober Shuttle — eight gold-tipped MM4 manipulators arranged radially around a central chip on a black stage.
PS8e · Nanoprobing

Prober Shuttle PS8e

A compact, fully integrated nanoprobing system — now encoded for automatic probe pre-alignment at the 3 nm node and beyond.

Explore the flagship
The MM3E micromanipulator — a compact three-axis arm in machined aluminium, brass and copper with a fine probe tip.
MM3E · Lift-out

MM3E

An encoded, closed-loop micromanipulator — define parking and working positions and recall them at the click of a button.

See the MM3E
2000+units installed worldwide
1991Nanomotor® invented
<1 nmpositioning resolution
3 nmadvanced nodes, probed in situ
Trusted in the world’s leading fabs and research labs
Independently validated in the peer-reviewed literature
  • Nature Communications
  • ACS Nano
  • Communications Engineering
  • Ultramicroscopy
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Applications

Start from the problem

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The portfolio

Nine families, one platform

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Works with your instrument

OEM-integrated or retrofit — Kleindiek tools add hands to virtually any microscope.

On film

Seen through the microscope

All videos
NanoprobingAnalyzing a single TSMC 7 nm transistor — a lab visit
TEM sample preparationTEM sample lift-out in the FIB/SEM with SemGlu and the Lift-out Shuttle
NanomanipulationManipulating nanowires with two MM3A-EM micromanipulators