Micromanipulators · MM3E

MM3E

An encoded, closed-loop micromanipulator — define parking and working positions and recall them at the click of a button.

Compatible
The MM3E micromanipulator — a compact three-axis arm in machined aluminium, brass and copper with a fine probe tip.
< 2 µmXYZ repeatability
< 0.5 × 10⁻⁶°Rotation resolution
0.05 nmResolution, axis C
< 1 nm/minDrift

Positions you can return to#

Based on the hugely successful MM3A-EM, the MM3E exhibits the same compactness, precision and stability, combined with closed-loop positional feedback on every axis. Define a parking position and a working position once, then recall each at the click of a button — instead of hunting for the same spot in the chamber run after run. Repeatability is better than 2 µm, with drift held below 1 nm/min.

Give your microscope a hand: use the MM3E to add new capabilities and functionality to your instrument.

A spherical drive that behaves like XYZ#

Drag-and-drop control software performs the coordinate transforms so the spherical, non-cartesian mechanism handles like a familiar XYZ stage, inside either the SEM or FIB view. The optional encoded axial rotation drive turns the specimen compucentrically, resolved to under 0.5 × 10⁻⁶° and repeatable to within 0.02°, so the point of interest stays framed as you rotate.

Built for the choreography of lift-out#

No backlash and no blind axis mean the tip goes exactly where the software says it will, run after run — which is what TEM lamella lift-out demands: approach, attach, cut free, transfer. The Tip Exchanger tool swaps probe tips without venting the chamber, so a session recovers from a mount or geometry change in minutes, not a pump-down cycle.

Specifications

Technical data

Overview

Mounting
M4 tapped hole
Working range
100 cm³
Repeatability (XYZ)
< 2 µm
Compucentric rotation FOV
~30 µm

Resolution

Axis A
0.5 nm (7 nrad)
Axis B
0.2 nm (7 nrad)
Axis C
0.05 nm
Rotation R
< 0.5 × 10⁻⁶°
Repeatability — R
< 0.02°
Drift
< 1 nm/min

Electrical & environment

Probing current
10 nA – 100 mA
Max. probing voltage
100 V
Signal resistance
7.0 Ω
Temperature range
273 K – 353 K
On film

See it run

MM3E — compucentric rotation of a microgripper
Three TEM lamellae lifted out in twelve minutes
Controlling the LiftOut Shuttle with iLO
Why it wins

Advantages

Closed-loop control

  • Positional feedback on every axis
  • Define parking and working positions, then recall them at a click
  • Optional encoded compucentric rotation keeps the point of interest centred as the sample turns

Spherical geometry, cartesian behaviour

  • Coordinate transforms make the non-cartesian drive handle like an XYZ stage, repeatable to better than 2 µm
  • One drive spans coarse and fine motion — no dead "blind axis" partway through a stroke
  • 100 cm³ working range, the same compact body as the MM3A-EM

Precise & stable

  • Resolution down to 0.05 nm on the C axis, with drift held below 1 nm/min
  • Compucentric rotation resolved to under 0.5 × 10⁻⁶°, repeatable to within 0.02°
  • One-year endurance tested for reliable operation

Built for lift-out

  • Drag-and-drop control software performs the cartesian coordinate transform for you
  • Compatible with virtually any SEM or FIB/SEM on the market
  • Probe tip exchange without venting the chamber, using the Tip Exchanger tool
Get in touch

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